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Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers

Author(s):
Ono, T.
Rozgonyi, G.A.
Au, C.
Messina, T.
Goodall, R.K.
Huff, H.R.
1 more
Publication title:
Proceedings of the Fifth International Symposium on High Purity Silicon V
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-13
Pub. date:
1998
Page(from):
125
Page(to):
134
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772075 [1566772079]
Language:
English
Call no.:
E23400/98-13
Type:
Conference Proceedings

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