
Wet and Dry Etch Selectivity For the GaAs/AlGaAs and GaAs/InGaP Systems
- Author(s):
- Publication title:
- Compound semiconductor power transistors and : State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIX)
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-12
- Pub. date:
- 1998
- Page(from):
- 201
- Page(to):
- 212
- Pub. info.:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772228 [1566772222]
- Language:
- English
- Call no.:
- E23400/98-12
- Type:
- Conference Proceedings
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