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High Speed Polishing of Silicon Dioxide Thin Films Using Linear Planarization Technology

Author(s):
Thornton, B.
Nagengast, A.
Pallinti, J.
Pant, A.
Jairath, R.
Krusell, W.
1 more
Publication title:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-7
Pub. Year:
1998
Page(from):
90
Page(to):
97
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772013 [156677201X]
Language:
English
Call no.:
E23400/98-7
Type:
Conference Proceedings

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