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Quantitative Optimization of the Dopant Concentration Range in BPSG Films for ULSI Circuit Technology

Author(s):
Publication title:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-6
Pub. Year:
1998
Page(from):
244
Page(to):
255
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772006 [1566772001]
Language:
English
Call no.:
E23400/98-6
Type:
Conference Proceedings

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