Environmental, Safety and Health Issues Associated with Low Dielectric Constant Films Grown by Chemical Vapor Deposition

Environmental, Safety and Health Issues Associated with Low Dielectric Constant Films Grown by Chemical Vapor Deposition

Author(s):

Publication title:

Environmental issues in the electronics/semiconductor industries and electrochemical/photochemical methods for pollution abatement

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

98-5

Pub. Year:

1998

Page(from):

27

Page(to):

34

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771993 [1566771994]

Language:

English

Call no.:

E23400/98-5

Type:

Conference Proceedings

Details

TDL ID:	ZA00013908
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries ; Symposium on Electrochemical and Photochemical Methods for Chemical Recycling and Pollution Abatement ; Annual Meeting of the Electrochemical Society
Conf. info. (Number):	1st ; 1998 ; 193rd
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	1998.05.00

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