Benzocyclobutene/Copper Reliability Study
- Author(s):
Yasmeen, N. Maner, K. Ang, S.S. Porter, E.V. Ulrich, R.K. Brown, W.D. - Publication title:
- Dielectric material integration for microelectronics
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-3
- Pub. Year:
- 1998
- Page(from):
- 299
- Page(to):
- 312
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771979 [1566771978]
- Language:
- English
- Call no.:
- E23400/98-3
- Type:
- Conference Proceedings
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