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Barium Strontium Titanate Capacitors for Future High Density DRAMs

Author(s):
Jones, R.E., Jr.
Zafar, S.
white, B.E.
Jiang, B.
Melnick, B.M.
Zurcher, P.
Chu, P.Y.
Taylor, D.J.
Remmel, T.P.
Gillespie, S.J.
5 more
Publication title:
Dielectric material integration for microelectronics
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-3
Pub. Year:
1998
Page(from):
196
Page(to):
205
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771979 [1566771978]
Language:
English
Call no.:
E23400/98-3
Type:
Conference Proceedings

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