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Selective UV-Laser Processing for Liftoff of GaN Thin Films from Sapphire Substrates

Author(s):
Wong, W.S.
Krger, L.
Cho, Y.
Linder, B.P.
Weber, E.R.
Cheung, N.W.
Sands, T.
2 more
Publication title:
Proceedings of the Symposium on Light Emitting Devices for Optoelectronic Applications and the Twenty-Eighth State-of-the-Art Program on Compound Semiconductors
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-2
Pub. date:
1998
Page(from):
377
Page(to):
384
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771948 [1566771943]
Language:
English
Call no.:
E23400/98-2
Type:
Conference Proceedings

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