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GRAZINGEMISSION X-RAY FLUORESCENCE SPECTROMETRY: A NOVEL TOOL FOR SURFACE CONTAMINATION ANALYSIS AND THIN FILM METROLOGY

Author(s):
deBokx, P.K.
Kidd, S.J.
Wiener, G.
Urbach, H.P.
De Gendt, S.
Mertens, P.W.
Heyns, M.M.
2 more
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1511
Page(to):
1523
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

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