Blank Cover Image

INVITED: SCIENCE AND MODELING OF IMPURITY GETTERING IN SILICON

Author(s):
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(2)
Pub. Year:
1998
Page(from):
1050
Page(to):
1063
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings DIFFUSION-SEGREGATION EQUATION AND SIMULATION OF THE DIFFUSION-SEGREGATION PHENOMENA

Tan, T.Y., Gafiteanu, R., Goesele, U.M.

Electrochemical Society
7 Conference Proceedings GETTERING OF METAL IMPURITIES BY CAVITIES IN SILICON

Myers, S.M., Follstaedt, D.M., Bishop, D.M., Medernach, J.W.

Electrochemical Society
2 Conference Proceedings Phosphorus and Aluminum Gettering of Gold in Silicon: Simulation and Optimization Considerations

Gafiteanu, R., Gosele, U., Tan, T. Y.

MRS - Materials Research Society
8 Conference Proceedings Precipitation of oxygen and intrinsic gettering in silicon

Tice, W.K., Tan, T.Y.

North Holland
3 Conference Proceedings DIFFUSION-SEGREGATION EQUATION FOR SIMULATION IN HETEROSTRUCTURES

Gafiteanu, R., You, H.-M., Goesele, U., Tan, T. Y.

MRS - Materials Research Society
9 Conference Proceedings A CONSISTENT MODEL FOR DISORDERING OF GaAs/A1As-SUPERLATTICES DURING ZINC DIFFUSION

Zimmermann, Horst, Tan, T.Y., Goesele, U

Materials Research Society
4 Conference Proceedings Point Defects, Diffusion, and Gettering in Silicon

Gosele, U., Conrad, D., Werner, P., Tong, Q-Y., Gafiteanu, R., Tan, T. Y.

MRS - Materials Research Society
10 Conference Proceedings GETTERING TECHNIQUES OF HEAVY METAL IMPURITIES IN SILICON

Sano, M., Sumita, S., Shigematsu, T., Fujino, N.

Electrochemical Society
5 Conference Proceedings The Influence of Carbon on the Effective Diffusivities of Intrinsic Point Defects in Silicon

Goesele, U., Ploessl, A., Tan, T.Y.

Electrochemical Society
11 Conference Proceedings He-induced Nanocavities for the Gettering of Metallic Impurities in Silicon

Ntsoenzok, E., Delamare, R., Alquier, D., Liu, C.L., Ashok, S., Ruault, M.O.

Electrochemical Society
6 Conference Proceedings Recent Progresses in Understanding Gettering in Silicon

Tan, T.Y.

Materials Research Society
12 Conference Proceedings Gold Diffusion in Silicon During Gettering by an Aluminum Layer

Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12