Blank Cover Image

CALCULATION OF SLIP LENGTH IN 300 mm SILICON WAFERS DURING THERMAL PROCESSES

Author(s):
Publication title:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-1(1)
Pub. date:
1998
Page(from):
671
Page(to):
682
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
Language:
English
Call no.:
E23400/98-1
Type:
Conference Proceedings

Similar Items:

Sueoka, K., Akatsuka, M., Onno, T., Asayama, E., Koike, Y., Adachi, N., Sadamitsu, S., Katahama, H.

Electrochemical Society

Akatsuka, M., Okui, M., Umeno, S., Sueoka, K.

Electrochemical Society

Sueoka,K., Akatsuka,M., Onno,T., Asayama,E., Koike,Y., Adachi,N., Sadamitsu,S., Katahama,H.

Electrochemical Society, SPIE-The International Society for Optical Engineering

Sueoka,K., Akatsuka,M., Nishihara,K., Yamamoto,T., Kobayashi,S.

Trans Tech Publications

Sueoka, K., Akatsuka, M., Okui, M., Katahama, H.

Electrochemical Society

Huff, H.R., Goodall, R.K., Griffiths, S.K., Nilson, R.H.

Electrochemical Society

Sueoka, K., Akatsuka, M., Okui, M., Katahama, H.

Electrochemical Society

Usami, A., Shiraki, H., Fujiwara, H., Abe, R., Osamura, N., Ichimura, M., Wada, T.

Materials Research Society

Sucoka, K., Yonemura, M., Akatsuka, M., Katahama, H., Ono, T., Asayama, E.

Electrochemical Society

Karoui, A., Karoui, F.S., Rozgonyi, G.A., Hourai, M., Sueoka, K.

Electrochemical Society

Akatsuka, M., Okui, M., Umeno, S., Sueoka, K.

Electrochemical Society

Karoui, A., Karoui, F.S., Rozgonyi, G.A., Hourai, M., Sueoka, K.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12