CHARACTERIZATION OF 300 mm SILICON POLISHED WAFERS
- Author(s):
- Publication title:
- Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-1(1)
- Pub. Year:
- 1998
- Page(from):
- 641
- Page(to):
- 659
- Pages:
- 19
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771931 [1566771935]
- Language:
- English
- Call no.:
- E23400/98-1
- Type:
- Conference Proceedings
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