Blank Cover Image

On the Electrical Properties of Silicon Wafer Bonding Structures: Evidence of Anomalous Pile-up of Phosphorus

Author(s):
Publication title:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-36
Pub. Year:
1997
Page(from):
373
Page(to):
380
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771894 [1566771897]
Language:
English
Call no.:
E23400/97-36
Type:
Conference Proceedings

Similar Items:

Dimitrakis, P., Papaioannou, G., Cristoloveanu, S.

Electrochemical Society

Deepa Nair,J.S., Prabhu,D., Rao,P.R.S., DasGupta,A., Karmalkar,S., DasGupta,N., Bhat,K.N.

SPIE-The International Society for Optical Engineering

Dimitrakis, P., Papaioannou, G.J., Cristoloveanu, S.

Electrochemical Society

J. Lu, Y. Park, X. Yu, G. Rozgonyi

Electrochemical Society

Dimitrakis, P., Jomaah, J., Balestra, F., Papaioannou, G.J.

Kluwer Academic Publishers

9 Conference Proceedings Discarding piled-up events in ACIS

Broos, P.S., Townsley, L.K., Nousek, J.A.

SPIE

Larsen, A. Nylandsted, Kanjilal, A., Hansen, J. Lundsgaard, Gaiduk, P., Normand, P., Dimitrakis, P., Tsoukalas, D., …

Materials Research Society

Amirfeiz, P., Bengtsson, S., Bergh, M., Zanghellini, E., Boerjesson, L.

Electrochemical Society

Bailey, P.T, Jin, G., Armstrong, B.M., Gamble, H.S.

Electrochemical Society

Exarchos, M., Papaioannou, G.J., Kouvatsos, D.N., Voutsas, A.T.

Electrochemical Society

Kolliopoulou, S., Tsoukalas, D., Dimitrakis, P., Normand, P., Paul, S., Pearson, C., Molloy, A., Petty, M. C.

Materials Research Society

Majoral, J. P., Bertrand, G., Baceiredo, A., Mazerolles, P.

American Chemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12