Blank Cover Image

EFFECTS CONTROLLING INITIATION AND TERMINATION OF GAS-PHASE CLEANING REACTIONS

Author(s):
Publication title:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-35
Pub. Year:
1997
Page(from):
315
Page(to):
321
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771887 [1566771889]
Language:
English
Call no.:
E23400/97-35
Type:
Conference Proceedings

Similar Items:

Brubaker, M., Staffa, J., Roman, P., Fakhouri, S., Ruzyllo, J.

Electrochemical Society

Roman, P., Tsai, C.-L., Hengstebeck, R., Pantano, C., Berry, J., Kamieniecki, E., Ruzyllo, J.

Electrochemical Society

Roman, P., Lee, D.-O., Wang, J., Wu, C.-T., Subramanian, V., Brubaker, M., Mumbauer, P., Grant, R., Ruzyllo, J.

Electrochemical Society

J. Ruzyllo

Electrochemical Society

Ruzyllo,J., Roman,P., Lee,D.-O., Brubaker,M., Kamieniecki,E.

SPIE - The International Society for Optical Engineering

Alaster J., Slagg N., Dewar S. J. M., Ritchie P. J., Wells C.

D. Reidel Publishing Company

Staffa, J., Roman, P., Chang, K., Torek, K., Ruzyllo, J.

MRS - Materials Research Society

Chang, K., Shallenberger, J., Chang, F.-M., Shanmugasundaram, K., Roman, P., Mumbauer, P., Ruzyllo, J.

Electrochemical Society

Ruzyllo,J., Roman,P., Staffa,J., Kashkoush,I., Kamieniecki,E.

SPIE-The International Society for Optical Engineering

O. O. Awadelkarim, J. Jiang, S. A. Suliman, K. Saipatwari, L. J. Passmore, D. Lee, P. Roman, J. Ruzyllo

Electrochemical Society

Lukasiak, L, Roman, P, Brubaker, M, Anc, M, Ruzyllo, I

Electrochemical Society

Lee, D., Roman, P., Mumbauer, P., Grant, R., Horn, M., Ruzyllo, J.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12