Blank Cover Image

HYDROGEN PLASMA CLEANING OF OXIDE PAlTERNED Si WAFERS FOR LOW TEMEPARATURE Si EPITAXY

Author(s):
Publication title:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-35
Pub. date:
1997
Page(from):
307
Page(to):
314
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771887 [1566771889]
Language:
English
Call no.:
E23400/97-35
Type:
Conference Proceedings

Similar Items:

Hwang, K-H., Yoon, E., Whang, K-W., Lee, J.Y.

Electrochemical Society

K.Y. Yoon, J.H. Byeon, B.J. Ko, J.H. Park, C.W. Park, J.H. Hwang, H.S. Yoon

Trans Tech Publications

Hansch, W., Eisele, I., Kibbel, H., Konig, U.

MRS - Materials Research Society

Kim,Y.H., Park,J.H., Lee,K.H., Choi,S.W., Yoon,H.S., Sohn,J.M.

SPIE-The International Society for Optical Engineering

J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. …

Trans Tech Publications

Banerjee, S., Tasch, A., Hsu, T., Qian, R., Kinosky, D., Irby, J., Mahajan, A., Thomas, S.

Materials Research Society

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society

K. H. Chung, J. C. Sturm

Electrochemical Society

H. Yu, J. Park, A.K. Okyay, K. Saraswat

Electrochemical Society

W.-H. Lee, J. H. Chae, D. I. Lee, H. K. Yoon, I. K. Park

Elsevier

C. Park, D. Kim, D. Yoon, W. Jung, H. Joo, F. Umme

Electrochemical Society

Chang, W., Yoon, K., Kim, J., Shin, B., Whang, K.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12