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QUANTITATIVE MODELING OF H2O2 DECOMPOSITION IN SC1

Author(s):
Mertens, P.
Baeyens, M.
Moyaerts, G.
Okorn-Schmidt, H.
Vos, R.
De Waele, R.
Hatcher, Z.
Hub, W.
De Gendt, S.
Knotter, M.
Meuris, M.
Heyns, M.
7 more
Publication title:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-35
Pub. Year:
1997
Page(from):
176
Page(to):
183
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771887 [1566771889]
Language:
English
Call no.:
E23400/97-35
Type:
Conference Proceedings

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