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Modelling of MOVPE Of Group III-Nitrides in Horizontal Tube Reactor

Author(s):
Galjukov, A.O.
Egorov, Yu.E.
Makarov, Yu.N.
Talalaev, R.A.
Kirchner, Ch.
Kamp, M.
Ebling, K.J.
2 more
Publication title:
Proceedings of the Second Symposium on III-V Nitride Materials and Processes
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-34
Pub. Year:
1997
Page(from):
244
Page(to):
252
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771870 [1566771870]
Language:
English
Call no.:
E23400/97-34
Type:
Conference Proceedings

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