Ion Implantation in Wide Bandgap Semiconductors: Device Needs and Technological Challenges
- Author(s):
- Publication title:
- Proceedings of the Second Symposium on III-V Nitride Materials and Processes
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-34
- Pub. Year:
- 1997
- Page(from):
- 76
- Page(to):
- 82
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771870 [1566771870]
- Language:
- English
- Call no.:
- E23400/97-34
- Type:
- Conference Proceedings
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