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On the Fabrication and Behavior of Diamond Microelectromechanical Sensors (DMEMS)

Author(s):
Davidson, J.L.
Kang, W.P.
Davis, L.
Holmes, K.
Howell, K.
Kems, D.V.
Henderson, T.G.
Eidson, R.
3 more
Publication title:
Proceedings of the Fifth International Symposium on Diamond Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-32
Pub. Year:
1997
Page(from):
635
Page(to):
651
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771856 [1566771854]
Language:
English
Call no.:
E23400/97-32
Type:
Conference Proceedings

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