Blank Cover Image

Interface and Volume Defects in SiNx:H/<100>Si Prepared by DECR Plasma Deposition

Author(s):
Aubert, P.
Delmotte, F.
Hugon, M.C.
Agius, B.
Cantin, J.L.
von Bardeleben, H.J.
1 more
Publication title:
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-30
Pub. Year:
1997
Page(from):
283
Page(to):
291
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771832 [1566771838]
Language:
English
Call no.:
E23400/97-30
Type:
Conference Proceedings

Similar Items:

Delmotte, F., Hugon, M.C., Sitbon, S., Agius, B., Courant, J.L.

Electrochemical Society

von Bardeleben, H.J., Cantin, J.L.

Trans Tech Publications

Delmotte, F., Hugon, M.C., Agius, B., Courant, J.L.

Electrochemical Society

Baranov, P.G., Ilyin, I.V., Mokhov, E.N., von Bardeleben, H.J., Cantin, J.L.

Trans Tech Publications

Agius, B., Hugon, M.C., Jiang, N., Varniere, F., Plais, F., Pribat, D., Froment, M., Puech, M.

Materials Research Society

von Bardeleben, H.J., Cantin, J.L., Reshanov, S.A., Rastegaev, V.P.

Trans Tech Publications

Cantin, J.L., von Bardeleben, H.-J.

Electrochemical Society

von Bardeleben, H.J., Cantin, J.L., Baranov, P.G., Mokhov, E.N.

Trans Tech Publications

von Bardeleben, H.J., Cantin, J.L., Shishkin, Y., Devaty, R.P., Choyke, W.J.

Trans Tech Publications

Cantin, J.L., Schoisswohl, M., von Bardeleben, H.J., Morazzani, V., Ganem, J.-J., Trimaille, I.

Electrochemical Society

von Bardeleben, H.J., Cantin, J.L., Mynbaeva, M., Saddow, S.E.

Trans Tech Publications

Cantin, J.L., von Bardeleben, H.J.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12