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Selective Epitaxial Growth of SiGe Films in LPCVD Reactor Systems- Characterization of SiGe Films by Ellipsometry

Author(s):
Lee, I.M.
Wang, W.C.
Koh, M.T.K.
Denton, J.P.
Takoudis, C.G.
Kram, E.P.
Neudeck, G.W.
2 more
Publication title:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-25
Pub. date:
1997
Page(from):
1348
Page(to):
1355
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771788 [1566771781]
Language:
English
Call no.:
E23400/97-25
Type:
Conference Proceedings

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