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Deposition of LPCVD Amorphous Silicon Thin Films With a Low Content of Germanium: Crystallization and Electrical Characteristics

Author(s):
Briand, D.
Kis-Sion, K.
Mohammed-Brahim, T.
Sarret, M.
Le Bihan, F.
Haji, L.
Bonnaud, O.
2 more
Publication title:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-25
Pub. Year:
1997
Page(from):
1340
Page(to):
1347
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771788 [1566771781]
Language:
English
Call no.:
E23400/97-25
Type:
Conference Proceedings

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