Blank Cover Image

Surface Roughness Evaluation of CVD Doped Oxide Films for Advanced Deep Sub-Micron Semiconductor Applications

Author(s):
Ilg, M.
Ploessl, R.
Stuber, J.
Conti, R.
Cote, D.
Gambino, J.
Tobben, D.
Kirchoff, M.
3 more
Publication title:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-25
Pub. Year:
1997
Page(from):
749
Page(to):
755
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771788 [1566771781]
Language:
English
Call no.:
E23400/97-25
Type:
Conference Proceedings

Similar Items:

Kirchhoff, M., Ilg, M., Cote, D.

Electrochemical Society

Schmitt,D.-R., Tobben,H.H., Ringel,G.A., Weissbrodt,P., Schrenk,M., Raupach,L., Hacker,E.J.

SPIE-The International Society for Optical Engineering

Sharangpani, R., Muthukrishnan, S., Kher, S., Narwankar, P., Goyani, T., Ma, Y., Ahmed, K., Conti, G.

Electrochemical Society

Ibsen,K.B., Ilzhoefer,J.R., Eickhoff,M.D.

SPIE-The International Society for Optical Engineering

Gambino J. R.

Plenum Press

Kittl, J. A., Prinslow, D. A., Apte, P. P., Pas, M. F.

MRS - Materials Research Society

GAMBINO R. J.

Martinus Nijhoff Publishers

Rojhantalab, H., Moinpour, M., Peter, N., Dass, M.L.A., Hough, W., Natter, R., Moghadam, F.

Materials Research Society

Gambino, J., Bandy, K., Chapple-Sokol, J., Conti, R., Dobuzinsky, D., Iggulden, R., Maldei, M., Peterson, K., Rupp, T., …

Electrochemical Society

Xu, D-X., Das, S. R., McCaffrey, J. P., Peters, C. J., Erickson, L. E.

MRS - Materials Research Society

Hoemmerich, U., Thaik, M., Zavada, J.M., Schwartz, R.N., Wilson, R.G., Pearton, S.J., Abernathy, C.R., MacKenzie, J.D.

Electrochemical Society

Silva, R., Perez-Ramirez, J. G., Romeu, D., Herrera, R., Perez, R., Jose Yacaman, M.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12