Blank Cover Image

Analysis of structural and electrical characteristics of low dose SIMOX

Author(s):
Anc, M.J.
Allen, L.P.
McMarr, P.J.
Mrstik, B.J.
Hughes, H.L.
Brothers, C.P.
1 more
Publication title:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-23
Pub. date:
1997
Page(from):
143
Page(to):
148
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771764 [1566771765]
Language:
English
Call no.:
E23400/97-23
Type:
Conference Proceedings

Similar Items:

M.J. Tadjer, K.D. Hobart, R.E. Stahlbush, P.J. McMarr, H.L. Hughes

Trans Tech Publications

Yoon, J. U., Kim, G. N., Krska, J-H. Y., Chung, J. E., Allen, L. P., Goodson, K., Kaeding, O., Nauka, K.

MRS - Materials Research Society

Litoechenko, V, Romanyk, B, Efremov, A, Klyui, M, Mel'nik, V P

Electrochemical Society

Revesz, A.G., Brown, G.A., Hughes, H.L.

Materials Research Society

Anc, M.J., Gostein, M., Banet, M., Allen, L.P.

Electrochemical Society

Flament, O., Paillet, P., Leray, J.L., Aspar, B., Giffard, B., Auberton-Herve, A.J.

Electrochemical Society

Allen, L P, Anc, M J, Duffy, M, Parechanian, J H, Yap, J H

Electrochemical Society

Aspar, B., Pudda, C., Papon, A.M., Auberton-Herve, A.J., Lamure, J.M.

Electrochemical Society

Hamada, K., Hamajima, T., Kitano, T., Ohnishi, H., Yoshino, A.

Electrochemical Society

Datta, R., Krishnamoorthy, V., Allen, L. P., Chandonnet, R., Farley, M., Jones, K. S.

MRS - Materials Research Society

Munteanu, D., Guilhalmenc, C., Cristoloveanu, S., Moriceau, H., Cartier, A.M., Aspar, B.

Electrochemical Society

Blake, J., Gelpey, J. C., Lee, D. M., Rowland, L., Rozgonyi, G. A.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12