Thin TiN capped Ti-salicide technology for 0.25 μm CMOS/SIMOX
- Author(s):
Matsubara, Y. Ohnishi, H. Ishigami, T. Iguchi, M. Nakamura, H. Horiuchi, T. - Publication title:
- Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-23
- Pub. Year:
- 1997
- Page(from):
- 110
- Page(to):
- 118
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771764 [1566771765]
- Language:
- English
- Call no.:
- E23400/97-23
- Type:
- Conference Proceedings
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