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Investigation of salicide processes for thin film SOI microwave applications

Author(s):
Chen, J.
Colinge, J.P.
Flandre, D.
Gillon, R.
Raskin, J.P.
Vanhoenacker, D.
1 more
Publication title:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-23
Pub. date:
1997
Page(from):
98
Page(to):
103
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771764 [1566771765]
Language:
English
Call no.:
E23400/97-23
Type:
Conference Proceedings

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