Blank Cover Image

Gettering of Cu to voids induced by H+ implantation in SIMOX substrate

Author(s):
Publication title:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-23
Pub. Year:
1997
Page(from):
86
Page(to):
91
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771764 [1566771765]
Language:
English
Call no.:
E23400/97-23
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CARRIER LIFETIME DISTRIBUTIONS AND RECOMBINATION KINETICS IN SILICON ON INSULATOR (SIMOX) SUBSTRATES

Lourenco, M.A., Homewood, K.P., Hemment, P.L.F.

Materials Research Society
7 Conference Proceedings Anomalous damage behavior of BF2+ implantation in silicon

C. Lin, Z.Y. Zhou, X.Q. Li, S. Zou, P.L.F. Hemment

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Nucleation of oxidation induced stacking faults (01SF) in ion implanted SIMOX structures

Giles, L.F., Nejim, A., Cristiano, F., Hemment, P.L.F.

Electrochemical Society
8 Conference Proceedings Synthesis of a buried oxide in related Si0.5Ge0.5 material using high energy oxygen implantation

Zhang, J.P., Hemment, P.L.F., Newstead, S.M., Powell, A.R., Whall, T.E., Parker, E.H.C.

Electrochemical Society
3 Conference Proceedings DETERMINATION OF THE NITROGEN CONTENT OF AS-IMPLANTED AND ANNEALED SIMOX SUBSTRATES

Kilner, J. A., Chater, R. J., Biswas, S., Hemment, P. L. F., Reeson, K. J.

Materials Research Society
9 Conference Proceedings Refractive index and compositional depth profiles in high energy SiMOX structures

Hatzopoulos, N., Siapkas, D.I., Katsidis, C.C., Zorba, T., Hemment, P.L.F.

Electrochemical Society
4 Conference Proceedings * SILICON ON INSULATOR FORMED BY 0+ OR N+ ION IMPLANTATION

Hemment, P.L.F.

Materials Research Society
10 Conference Proceedings SiGe heterojunction bipolar transistors on insulating substrates

Hall, S., Buiu, O., Mitrovic, I.Z., Mubarek, H.A. W. El, Ashburn, P., Bain, M., Gamble, H.S., Wang, Y., Hemment, P.L.F., …

Kluwer Academic Publishers
5 Conference Proceedings Delineation of crystallographic defects in ultra thin SIMOX materials produced by low energy low dose oxygen implantation

Giles, L.F., Meyyappan, N., Nejim, A., Blake, J., Cristiano, F., Hemment, P.L.F.

Electrochemical Society
11 Conference Proceedings DOSE DEPENCE OF DEFECTS IN SILICON PRODUCED BY HIGH DOSE,HIGH TEMPERATURE 0+ IMPLANTATION.

HOBBS,A., BARKLIE,R.C., REESON,K., HEMMENT,P.L.F.

Trans Tech Publications
6 Conference Proceedings Formation and characterization of double SIMOX structures by sequential high and low energy oxygen implantation into silicon

Hatzopoulos, N., Siapkas, D.I., Hemment, P.L.F., Skorupa, W.

Electrochemical Society
12 Conference Proceedings IMPROVED SOI FILMS BY HIGH DOSE OXYGEN IMPLANTATION AND LAMP ANNEALING

Celler, G.K., Hemment, P.L.F., West, K.W., Gibson, J.M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12