Blank Cover Image

Effects of buried oxide and point defect saturation on redistribution of boron in thin-film silicon-on-insulator (TFSOI)

Author(s):
Publication title:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-23
Pub. date:
1997
Page(from):
63
Page(to):
68
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771764 [1566771765]
Language:
English
Call no.:
E23400/97-23
Type:
Conference Proceedings

Similar Items:

Wilson, S.R., Hwang, B.Y., Foerstner, J., Wetteroth, T., Racanelli, M., Tsao, J., Huang, M.

Electrochemical Society

Pindl, S., Biebl, M., Hammerl, E., Schaefer, H., von Philipsborn, H.

Electrochemical Society

Mao, B.-Y., Chang, P.-H., Lam, H.W., Shen, B.W., Keenan, J.A.

Materials Research Society

Bain, M., Stefanos, S., Baine, P., Loh, S.H., Jin, M., Montgomery, J.H., Armstrong, B.M., Gamble, H.S., Hamel, J., …

Kluwer Academic Publishers

Racanelli, M, Huong, W M, Shin, H C, Foerstner, J, Pork, H, Ford, J, Wetteroth, T, Hong, S, Shin, H, Wilson, S R

Electrochemical Society

Nam, I.-H., Hong, S.I., Sim, J.S., Park, B.-G., Lee, J.D., Lee, S.-W., Kang, M.-S., Kim, Y.-W., Suh, K.-P.

Electrochemical Society

Barr, David L., Gualtieri, G, J., Case, C. B., Marcus, M. A., Brown, W. L.

MRS - Materials Research Society

Kim, H-K, Lee, J-W, Lee, W-H, Oh, M-R, Koh, Y-H

Electrochemical Society

T. Shimura, M. Shimizu, S. Horiuchi, H. Watanabe, K. Yasutake

Electrochemical Society

Meda, L., Bertoni, S., Cerofolini, G.F., Spaggiari, C., Gassel, H.

Electrochemical Society

Lee, G.-S., Park, J. -G., Choi, S. -P., Shin, C.-H,, Sun, Y.-B, Kwak, Y.-S., Shin, C.-K., Smith, W. L., Hahn, S.

Materials Research Society

Johnson, N. M., Moyer, M. D., Fennell, L. E., Maby, E. W., Atwater, H.

North-Holland

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12