SOI materials for mainstream CMOS technology

SOI materials for mainstream CMOS technology

Author(s):

Publication title:

Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-23

Pub. Year:

1997

Page(from):

15

Page(to):

26

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771764 [1566771765]

Language:

English

Call no.:

E23400/97-23

Type:

Conference Proceedings

Details

TDL ID:	ZA00013885
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society ; Annual Meeting of the International Society of Electrochemistry
Conf. info. (Number):	8th ; 192nd ; 48th
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	1997.08.31-1997.09.05

Similar Items:

1 Conference Proceedings Fully Silicided Metal Gates for High Performance CMOS Technology - Maszara, W.P. Electrochemical Society	7 Conference Proceedings Mainstreaming SOI CMOS technology Shahidi,G.G. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Mainstreaming SOI CMOS technology Shahidi,C.G. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Mainstreaming SOI CMOS technology Shahidi,G.G. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Integration Challenges for Double-Gate MOSFET Technologies Maszara, W.P. Materials Research Society	9 Conference Proceedings MATERIALS REQUIREMENTS FOR FUTURE SEMICONDUCTOR TECHNOLOGY Seidel, T.E., Vasudev, P.K., Stanley, T. Electrochemical Society
4 Conference Proceedings * SOLID PHASE EPITAXIAL RECRYSTALLIZATION OF SOS, WITH APPLICATIONS TO SUBMICROMETER CMOS AND BIPOLAR DEVICES Vasudev, P.K. Materials Research Society	10 Conference Proceedings A comparative evaluation of 200 mm SOI wafers through state-of-the-art materials characterisation Mendicino, M A, Vasuder, P K, Maillot, P, Gondran, C Electrochemical Society
5 Conference Proceedings A HIGH PERFORMANCE SUBMICROMETER CMOS/SOI TECHNOLOGY USING ULTRATHIN SILICON FILMS ON SIMOX vasudev, P. K., Terrill, K. W., Seymour, S. Materials Research Society	11 Conference Proceedings The Economics of SOI Material Choices Craven, R.A., Downey, W.P. Electrochemical Society
6 Conference Proceedings Mainstreaming SOI CMOS technology Shahidi,G.G. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Mainstreaming SOI Technology for High Performance CMOS Shahidi, G.G. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12