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Impact of silicon substrate oxygen precipitation fine tuning on high density memories retention time

Author(s):
Borionetti, G.
Falster, R.
Bertolini, S.
Cornara, M.
Olmo, M.
Chalmers, G.
Childs, R.
Marcuccilli, G.
3 more
Publication title:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-22
Pub. date:
1997
Page(from):
196
Page(to):
203
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771757 [1566771757]
Language:
English
Call no.:
E23400/97-22
Type:
Conference Proceedings

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