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Proton irradiation induced lattice defects in Si diodes and their effects on device performance

Author(s):
Ohyama, H.
Simoen, E.
Claeys, C.
Vanhellemont, J.
Takami, Y.
Hayama, T.
Sunaga, H.
Kobayashi, K.
3 more
Publication title:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-22
Pub. date:
1997
Page(from):
143
Page(to):
152
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771757 [1566771757]
Language:
English
Call no.:
E23400/97-22
Type:
Conference Proceedings

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