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The Structure and Composition of Thermal Oxides Formed on GaAs at 500℃

Author(s):
Publication title:
Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-21
Pub. date:
1997
Page(from):
305
Page(to):
316
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771498 [1566771498]
Language:
English
Call no.:
E23400/97-21
Type:
Conference Proceedings

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