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High-Rate Etching of Metals for Magnetoelectronic Applications

Author(s):
Pearton, S.J.
Jung, K.B.
Hong, J.
Lee, J.W.
Caballero, J.A.
Childress, J.R.
Jenson, M.
Hurst, A.T., Jr.
3 more
Publication title:
Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-21
Pub. Year:
1997
Page(from):
270
Page(to):
285
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771498 [1566771498]
Language:
English
Call no.:
E23400/97-21
Type:
Conference Proceedings

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