Blank Cover Image

Optimal Design of Gas Inlets for Stagnation Flow MOVPE Reactors

Author(s):
Publication title:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-9
Pub. date:
1997
Page(from):
300
Page(to):
307
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771368 [1566771366]
Language:
English
Call no.:
E23400/97-9
Type:
Conference Proceedings

Similar Items:

Gupta, V., Theodoropoulos, C., Peck, J. D., Mountziaris, T. J.

MRS - Materials Research Society

Joungmo Cho, T.J. Mountziaris

American Institute of Chemical Engineers

Theodoropoulos, C., Moffat, H. K., Mountziaris, T. J.

MRS - Materials Research Society

Joungmo Cho, T.J. Mountziaris

American Institute of Chemical Engineers

Safvi, S.A., Mountziaris, T.J.

Materials Research Society

Ingle, N.K., Mountziaris, T.J.

Materials Research Society

Pawlowski, R. P., Theodoropoulos, C., Mountziaris, T. J., Moffat, H. K., Han, J., Thrush, E. J.

MRS-Materials Research Society

Sarigiannis, D., Peck, J. D., Mountziaris, T. J., Kioseoglou, G., Petrou, A.

MRS-Materials Research Society

Mountziaris, T. J., Pawlowski, Roger P., Peck, John D., Sarigiannis, Demetrius

American Institute of Chemical Engineers

Mountziaris, T. J., Pawlowski, Roger P., Peck, John D, Sarigiannis, Demetrius

American Institute of Chemical Engineers

Mountziaris, T.J., Ingle, N.K., Kalyanasundaram, S.

Materials Research Society

Hahn, D.W., Edwards, C.F., McCarty, K.F., Kee, R.J.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12