Reliability Evaluation of Low-k Dielectrics for Sub-Micron Interconnection Application
- Author(s):
Nguyen, D.B. Mcgahay, V. Endicott, G. Aggarwala, B. Rathore, H.S. Yankke, S. - Publication title:
- Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-8
- Pub. Year:
- 1997
- Page(from):
- 112
- Page(to):
- 125
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771351 [1566771358]
- Language:
- English
- Call no.:
- E23400/97-8
- Type:
- Conference Proceedings
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