Blank Cover Image

Non-Contact Characterization of Ultrathin Dielectrics for the Gigabit Era

Author(s):
Roy, P.K.
Chacon, C.
Ma, Y.
Kizilyalli, I.C.
Horner, O.S.
Verkuil, R.L.
Miller, T.G.
2 more
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-12
Pub. date:
1997
Page(from):
280
Page(to):
294
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771399 [1566771390]
Language:
English
Call no.:
E23400/97-12
Type:
Conference Proceedings

Similar Items:

Roy,P.K., Chacon,C., Ma,Y., Kizilyalli,I.C., Horner,G.S., Verkuil,R.L., Miller,T.G.

SPIE-The International Society for Optical Engineering

Karamcheti, A., Watt, V. H. C., Luo, T. Y., Brady, D., Shaapur, F., Vishnubhotla, L., Gale, G., Huff, H. R., Jackson, M. …

MRS-Materials Research Society

Kizilyalli, I.C., Roy, P.K.

Electrochemical Society

8 Conference Proceedings Soft Breakdown in Ultrathin Oxides

Weir, B. E., Silverman, P. J., Alers, G. B., Monroe, D., Alam, M. A., Sorsch, T. W., Green, M. L., Timp, G. L., Ma, Y., …

MRS - Materials Research Society

Roy,P.K., Chacon,C.M., Ma,Y., Homer,C.S.

SPIE-The International Society for Optical Engineering

Hattangady,S.V., Grider,O.T., Kraft,R., Shiau,W.-T., Douglas,M.A., Nicollian,P., Rodder,M., Brown,G.A., Chatterjee,A., …

SPIE-The International Society for Optical Engineering

Roy, P. K., Laughery, M. A., Chacon, C. M., Kanan, A. M., Daugherty, T.

MRS - Materials Research Society

Kizilyalli,I.C., Huang,R.Y., Hwang,D., Kane,B.C., Ashton,R., Kuehne,S., Deng,X., Twiford,M.S., Martin,E.P., …

SPIE-The International Society for Optical Engineering

Roy,P.K., Ma,Y.

SPIE-The International Society for Optical Engineering

Weittzierl,S.R., Miller,T.G.

SPIE - The International Society for Optical Engineering

Roy, P.K., Kook, T., Kizilyalli, I.C., Nanda, A.K.

Materials Research Society

Kizilyalli,I.C., Abein,G., Chen,Z., Weber,G.R., Register,F., Harris,E., Chetlur,S., Higashi,G.S., Schofieled,M., Sen,S., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12