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Lattice Strain and Defects in Epitaxial Silicon Wafers

Author(s):
Kirscht, F.
Snegirev, B.
Zaumseil, P.
Kissinger, G.
Takashima, K.
Wildes, P.
Hennessy, J.
2 more
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-12
Pub. date:
1997
Page(from):
60
Page(to):
67
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771399 [1566771390]
Language:
English
Call no.:
E23400/97-12
Type:
Conference Proceedings

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