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High Quality Gate Oxide in p-Type 6H-SiC MOS Structures Made by the Jet Vapor Deposition Process

Author(s):
Wang, X.W.
Ma, T.P.
Cui, G.J.
Tamagawa, T.
Schmitt, J.J.
Halpern, B.
1 more
Publication title:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-10
Pub. Year:
1997
Page(from):
332
Page(to):
337
Pages:
6
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
Language:
English
Call no.:
E23400/97-10
Type:
Conference Proceedings

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