Monte Carlo Simulation of Boron Diffusion in Sil-icon Oxides and Oxynitrides

Monte Carlo Simulation of Boron Diffusion in Sil-icon Oxides and Oxynitrides

Author(s):

Publication title:

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-10

Pub. Year:

1997

Page(from):

285

Page(to):

296

Pages:

12

Pub. info.:

Pennington, New Jersey: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771375 [1566771374]

Language:

English

Call no.:

E23400/97-10

Type:

Conference Proceedings

Details

TDL ID:	ZA00013870
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Conf. info. (Number):	4th
Conf. info. (Venue):	Montreal, QC, Canada
Conf. info. (Date):	1997.05.04-1997.05.09

Similar Items:

1 Conference Proceedings The Thermal Growth of Silicon Gate Oxynitrides Ellis, K.A., Carr, E.C., Buhrman, R.A. Electrochemical Society	7 Conference Proceedings Excited State Dynamic-Node Diffusion Monte Carlo Simulations Beck R. D., Henkelman G., Watts O. R. Kluwer
2 Conference Proceedings Structure and Growth of N2O Gate Oxynitrides Ellis, K. A., Carr, E. C., Buhrman, R. A. MRS - Materials Research Society	8 Conference Proceedings Monte Carlo Simulation of Boron Diffusion During Low Energy Implantation and High-Temperature Annealing Caturla, M-J., Rubia, T. Diaz de la, Zhu, J., Johnson, M. MRS - Materials Research Society
3 Conference Proceedings Monte Carlo Simulation for Reliability Physics Modeling and Prediction of Scaled (100NM) Silicon MOSFET Devices Hulfachor B. R., Ellis-Monaghan J. J., Kim W. K., Littlejohn A. M. Kluwer Academic Publishers	9 Conference Proceedings Simulation of Water Clusters with Ridig-Body Diffusion Monte Carlo Clary C. D., Gregory K. J. Kluwer
4 Conference Proceedings Three-Dimensional Monte Carlo Simulation of Implanted Boron and Damage Distribution in Crystalline Silicon Considering Mask Structure Son, M.-S., Lee, J.-H., Byun, K.-R., Hwang, H.-J. Electrochemical Society	10 Conference Proceedings Monte Carlo Simulation of Alloy and Multimetallic Surfaces Smale, M. W., Strohl, J. K.., Donnelly, R. G., King, T. S. American Institute of Chemical Engineers
5 Conference Proceedings Monte-Carlo simulations of arterial imaging with optical coherence tomography Amendt,P.A., Estabrook,K.C., Everett,M.J., London,R.A., Maitland,D.J., Zimmerman,G.B., Colston,B.W.,Jr., Silva,L.B.Da, … SPIE - The International Society for Optical Engineering	11 Conference Proceedings The Formation and Oxidation Resistance of Boron-Modified and Germanium-Doped Silicide Diffusion Coatings for Titanium and Molybdenum Cockeram,B.V., Rapp,R.A. Trans Tech Publications
6 Conference Proceedings Laser optoacoustic imaging of turbid media:determination of optical properties by comparison with diffusion theory and Monte Carlo simulation Oraevsky,A.A., Esenaliev,R.O., Tittel,F.K., Ostermeyer,M.R., Wang,L., Jacques,S.L. SPIE-The International Society for Optical Engineering	12 Conference Proceedings (148c) Teaching Molecular Dynamics and Monte Carlo Simulations: Lessons Learned From the Statistical Thermodynamics Workshops At the School of Advanced Studies … Edward J. Maginn, Frederico W. Tavares, Charlles R.A. Abreu, Jindal K Shah, Craig Tenney American Institute of Chemical Engineers

1

2

3

4

5

6

7

8

9

10

11

12