Stress and Bonding Characterization of PECYD Silicon Dioxide Films
- Author(s):
- Publication title:
- Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-10
- Pub. Year:
- 1997
- Page(from):
- 217
- Page(to):
- 231
- Pages:
- 15
- Pub. info.:
- Pennington, New Jersey: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771375 [1566771374]
- Language:
- English
- Call no.:
- E23400/97-10
- Type:
- Conference Proceedings
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