Blank Cover Image

Thickness Determination of Ultra-Thin SiO2 Films on Si by Spectroscopic Ellipsometry

Author(s):
Publication title:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-10
Pub. Year:
1997
Page(from):
183
Page(to):
193
Pages:
11
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
Language:
English
Call no.:
E23400/97-10
Type:
Conference Proceedings

Similar Items:

Richter, C. A., Nguyen, N. V., Alers, G. B.

MRS - Materials Research Society

Dahmani, R., Salamanca-Riba, L., Beesabathina, D.P., Nguyen, N.V., Chandler-Horowitz, D., Jonker, B.T.

Materials Research Society

Chu Wan Huang, Zhe Chuan Feng, Yia Chung Chang, Tingkai Li

Materiaeditors, Tingkai Li ... [et al.] ls Research Society

Edwards, N.V., Vella, J., Xie, Q., Zollner, S., Werho, D., Adhihetty, I., Liu, R., Tiwald, T.E., Russell, C., Vires, J., …

Materials Research Society

Cox, J.N., Hutchinson, J.M., Lee, K.K.D., Sheridan, B., Wong, R., Yang, I.-C.J.

Electrochemical Society

Pantelic, N., Piruska, A., Seliskar, C.J.

Trans Tech Publications

Fiory, A.T., Roy, P. K., Jellison, G.E.

Materials Research Society

Brierley, Steven K., Nguyen, Lan

MRS - Materials Research Society

Woollam, J.A., Bungay, C.L., Yan, L., Thompson, D.W., Hilfiker, J.N.

SPIE-The International Society for Optical Engineering

Camacho-Lopez, M. A., Sanchez-Perez, C. A., Esparza-Garcia, A., Ghibaudo, E., Rodil, S., Muhl, S., Escobar-Alarcon, L.

SPIE - The International Society of Optical Engineering

Edwards, N.V., Lindquist, O.P.A., Madsen, L.D., Zollner, S., Jarrehdahl, K., Cobet, C., Peters, S., Esser, N., Konkar, …

Materials Research Society

Nguyen, N.V., Maslar, J.E., Kim, Jin-Yong, Han, Jin-Ping, Park, Jin-Won, Chandler-Horowitz, D., Vogel, E.M.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12