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On the Breakdown Statistics and Mechanisms in Ultra-Thin Oxides and Nitrided Oxides

Author(s):
Groeseneken, G.
Degraeve, R.
De Blauwe, J.
Roussel, P.
Depas, M.
Maes, H.
1 more
Publication title:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-10
Pub. Year:
1997
Page(from):
3
Page(to):
19
Pages:
17
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
Language:
English
Call no.:
E23400/97-10
Type:
Conference Proceedings

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