The Electrochemical Micromachining of Microactuator Devices From Sputtered NiTi Thin Films

The Electrochemical Micromachining of Microactuator Devices From Sputtered NiTi Thin Films

Author(s):

Publication title:

Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-5

Pub. Year:

1997

Page(from):

72

Page(to):

78

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771320 [1566771323]

Language:

English

Call no.:

E23400/970514

Type:

Conference Proceedings

Details

TDL ID:	ZA00013866
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 191st
Conf. info. (Venue):	Montreal, Canada
Conf. info. (Date):	1997.05.04-1997.05.09

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