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Surface Roughness of Silicon Diaphragm Due to Ionic Contamination During Electrochemical Etching of Silicon

Author(s):
Publication title:
Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-5
Pub. Year:
1997
Page(from):
64
Page(to):
71
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771320 [1566771323]
Language:
English
Call no.:
E23400/970514
Type:
Conference Proceedings

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