Recent Innovation of ULSI Technologies in Japan

Author(s):

Sugano, T.  

Publication title:

ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

97-3

Pub. Year:

1997

Page(from):

33

Page(to):

36

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771306 [1566771307]

Language:

English

Call no.:

E23400/970512

Type:

Conference Proceedings