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Wet Oxidation of AlGaAs: Arsenic Barriers on the Road to MIS

Author(s):
Ashby, C.I.H.
Sullivan, J.P.
Newcomer, P.P.
Missert, N.A.
Hou, H.Q.
Hammons, B.E.
Baca, A.G.
2 more
Publication title:
Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-1
Pub. Year:
1997
Page(from):
58
Page(to):
65
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771283 [1566771285]
Language:
English
Call no.:
E23400/970510
Type:
Conference Proceedings

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