Effect of Surface Nucleation on the Evolution of Crystalline Microstructure During Solid Phase Crystallization of Amorphous Si Film on SiO2

Effect of Surface Nucleation on the Evolution of Crystalline Microstructure During Solid Phase Crystallization of Amorphous Si Film on SiO2

Author(s):

Publication title:

Proceedings of the Third Symposium on Thin Film Transistor Technologies

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-23

Pub. Year:

1996

Page(from):

310

Page(to):

316

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771733 [1566771730]

Language:

English

Call no.:

E23400/970103

Type:

Conference Proceedings

Details

TDL ID:	ZA00013856
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Thin Film Transistor Technologies - TFTT
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Antonio, Texas, USA
Conf. info. (Date):	1996.10.07-1996.10.11

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