Microstructural and Electrochemical Aspects of Wet Etching ITO Films

Microstructural and Electrochemical Aspects of Wet Etching ITO Films

Author(s):

Publication title:

Proceedings of the Third Symposium on Thin Film Transistor Technologies

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-23

Pub. Year:

1996

Page(from):

158

Page(to):

173

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771733 [1566771730]

Language:

English

Call no.:

E23400/970103

Type:

Conference Proceedings

Details

TDL ID:	ZA00013856
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Thin Film Transistor Technologies - TFTT
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Antonio, Texas, USA
Conf. info. (Date):	1996.10.07-1996.10.11

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