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Mechanism of Chemical Mechanical Polishing Process for Oxide-Filled Shallow Trench Isolation Applications

Author(s):
Publication title:
Proceedings of the First International Symposium on Chemical Mechanical Planarization
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-22
Pub. Year:
1996
Page(from):
36
Page(to):
46
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771726 [1566771722]
Language:
English
Call no.:
E23400/970318
Type:
Conference Proceedings

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