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Oxygen Ion Beam Oxidation of Silicon: An ESCA Study

Author(s):
Publication title:
Proceedings of the Symposium on Surface Oxide Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-18
Pub. Year:
1996
Page(from):
143
Page(to):
148
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771689 [1566771684]
Language:
English
Call no.:
E23400/963436
Type:
Conference Proceedings

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